TFT专业词汇集锦.pptx

Asgreatdevelomentofthescienceandtechnology,(先熟悉TFT相关词语)2TogetheringwithoralEnglishindailywork(联系日常工作的口语表达)municationwithforeigners(结合专业知识灵活运用专业词汇来与老外进行一般的沟通)LCD(LiquidCrystalDisplay)液晶显示器Glass,lasssubstrate玻璃基版TFT(ThinFilmTransistor)薄膜晶体管Panel面板Array排列,指在玻璃基板上做TFT的制程LCD-ArrayCell液晶填充制程…….分为LCD-FEOL(Cell前段)LCD-BEOL(Cell后段含CellTester)Module模块,指后段组装制LCMMonitor监视器Pixel像素RGB(Red,Green,Blue)红绿蓝三原色PM(PreventiveMaintenance)预防保养Quality品质Standard标准(指作业标准或质量指针)puterIntegrationManufacturing)计算机整合制造(指以计算机系统整合制造流程)FA(FactoryAutomation工厂自动化).CleanRoom(洁净室专有名词)Warning警告Emergency紧急Alarm警报CleanroomHEPA(HighEfficientParticulateAir)filter高效能粒子空气过滤网Temperature(TEMP)温度Humidity湿度Pressure压力UPW(Ultra-PureWater)超纯水DIW(De-IonizedWater)去离子水Cleanliness洁净度ESD(Electro-staticDischarge)静电破坏Dust灰尘Gowningroom换衣间Airshower气浴室Cleansuit(bunnysuit,dust-freegarment)网帽Hood头罩Mask口罩Cleanshoes(dust-freeshoes,boots)无尘鞋Vehicle运输工具或载具AGV(AutomaticGuidedVehicle)自动搬运车MGV(ManualGuidedVehicle)人力搬运车Cleanlifter天井传送车LIM(LinearInductionMotor)Carrier线性感应马达传送载具OHS(OverheadShuttle)天车或称轨道车Stocker(cleandepot)存放Cassette(架子)的暂存区Host主机I/O(Input/Output)输入/输出Inter-bay作业区和作业区之间Intra-bay作业区之内FactoryAutomation(工厂自动化专有名词)Battery电池Bay作业区Bumper保险杠Charger充电器Controller控制器Conveyor输送带Crane吊车(在Stocker内)FFU(FanFilterUnit)风扇过滤器IR(Infra-Red)红外线IRIF(Infra-RedInterFace)ictapeAGV路径所使用的磁条Material材料Metal金属Target靶MoW(Moly-tungsten)钨化钼Mo(Molybdenum)钼ITO(IndiumTinOxide)铟锡氧化物Al(Aluminum)铝Array段制程专有名词介绍AlNd(AluminumandNeodymiumAlloy)铝和钕的合金以上皆为溅镀机金属靶的材料之一ReticleorMask光罩Detergent(LH-300)界面活性剂的一种(清洗机用来清洗玻璃表面用LH-300为供货商型号)O3(Ozone)臭氧,主要为各制程用来清除有机物的污染或残留NBA(1-butylAcetate)乙酸正丁酯,主要用来清洗旋转涂布光阻时残留在玻璃边缘的光阻液ResistorPhotoResist光阻(简称PR)Vender厂商Cleaner清洗机CVD(ChemicalVaporDeposition)化学气相沉积Sputter溅镀机Coater上光阻机Pre-bake预烘Stepper步进式曝光机Exposure曝光Backside-Exposure背面曝光EdgeExposure边缘曝光Developer显影机Etcher蚀刻机RIE(ching)反应性离子蚀刻Stripper去光阻机Tester测试机